新型肖特基場發射掃描電鏡SU7000
－可獲得樣品的各種信息，實現高通量分析－

肖特基場發射掃描電鏡SU7000，它縮短了通過采集多種信號獲取樣品多種信息的時間，真正實現了高通量的觀察與分析。

                                             SU7000外觀圖

 
    掃描電子顯微鏡（SEM）可通過檢測樣品激發出的二次電子、背散射電子、X射線等信號，獲得從微細結構到組成成分等各種信息，因此被廣泛應用于納米技術、半導體、電子器件、生物、材料等諸多領域。隨著SEM的應用范圍在不斷擴大，對觀察時間的縮短、信號的迅速高效采集提出了更進一步的需求。
   SU7000采用全新設計的探測器，使得對二次電子信號、背散射電子信號的檢測以及分離能力大大提升。以前我們要根據獲得的信號來調整樣品與透鏡之間的距離（工作距離／以下簡稱WD），以設置合適的觀察與分析條件，而SU7000通過新研發的樣品倉以及檢測器系統，可在不改變WD的條件下更高效地接收各種信號，縮短了樣品觀察和分析的時間，提高了測試效率。
    而且，SU7000還配置了可同時6通道顯示界面（前代機型只能同時顯示4通道），進一步升級SEM控制系統，大幅提高了信號獲取速度，由此實現了樣品的高通量觀察。
    它還標配超大樣品倉，增設了附件接口，可適用于各種樣品的觀察與分析。
日立高新技術將在8月5日（星期日）～8月9日（星期四）在美國馬里蘭州舉辦的“Microscopy & Microanalysis”及9月5日（星期三）～9月7日（星期五）在幕張展示中心（千葉縣千葉市）舉辦的“JASIS 2018”上展示這款SU7000，預計每年全球銷量有望達150臺。


【主要特點】
1．在相同WD的條件下，可同時實現二次電子、背散射電子觀察與X射線分析
2．最多可同時實現6通道檢測與顯示
3．在高像素10,240 x 7,680時，也可獲得圖像數據
4．同級別*設備中最多的可配置18個附件接口
5．支持最低300Pa的低真空模式（選配）
*空間分辨率在1 nm/1 kV以下

【主要規格】

Key Concept

1. Versatile Imaging Capability
   The SU7000 excels in fast acquisition of multiple signals to address expansive SEM needs, from imaging a wide field of view to visualizing sub-nanometer structures and everything in between.
    The incorporation of newly designed electron optics and detection systems allows for efficient simultaneous acquisition of multiple secondary electron and back-scattered electron signals.
2. Multi-Channel Imaging
   The number of the detectors mounted on the SEM is ever increasing, along with the need to display all collected information effectively.
    The SU7000 is capable of processing, displaying, and saving up to 6 signals simultaneously to maximize information acquisition.
3. Wide Variety of Observation Techniques
   The specimen chamber and the vacuum system are optimized for:
   ?Large specimen size
   ?Sample manipulation at various axes
   ?Variable pressure conditions
   ?Cryogenic conditions
   ?Heating and cooling in-situ observation
4. Microanalysis
   The electron gun is equipped with a Schottky emitter that provides up to 200 nA beam current to accommodate various microanalysis applications.
    The specimen chamber and port layout are designed to incorporate multiple analytical options including EDX, WDX, EBSD, cathodoluminescence, and more.
    The SU7000 with the combination of numerous analytical accessories unifies multi-discipline techniques in a single platform.

Imaging Performance

Enhanced Information Acquisition

Single-Scan Multi-Signal Imaging

Simultaneous image acquisition for surface micro-structural information (UD), surface coating (MD), and overall topographic information (LD). Acceleration voltage: 1 kV

Intuitive Graphical User Interface

Enhanced Signal Display

• Customizable display modes.
• Single and Dual-monitor configurations.
• Simultaneous image display up to 4-ch (single) and 6-ch (dual).
• Chamber Scope and SEM MAP for optical stage navigation.

Highly Flexible Screen Layout

The software is capable of display 1, 2, or 4 signals including the chamber scope or SEM MAP on a single monitor.
Additionally, the operation panel can be customized to display submenus anywhere on the screen.

Dual Monitor

The first monitor can be used as a dedicated image display while the second monitor is utilized for operation.
Five detector images (UD, LD, UVD, MD, and PD-BSED) and SEM MAP of non-metallic inclusions in a steel specimen are displayed (left).
The screen shows the operation panel menu and the thumbnail image window on one screen (right).
The dual-monitor configuration supports increased productivity with expanded w

Expandable Observation and Analysis

Large specimen chamber and large stage

The specimen chamber can accommodate a tall specimen of φ 200 mm or 80 mm in height and 18 accessory ports. The large stage travels 135 mm (X) x 100 mm (Y) and can accept up to 2 kg of specimen.^(*) Large specimen or variable type of sub-stages can be easily mounted on the front-opening large stage door.

(*)at 0° tilt

Camera Navigation^(*)

Left: Picture of the sample captured by the camera equipped inside the chamber.
Right: Camera image transferred to the SEM MAP screen for navigation.

The camera navigation feature correlates an optical image to the target observation area.
The camera installed in the specimen chamber captures the specimen image at the time of specimen introduction. The image is transferred to the SEM MAP screen for a graphically driven navigation interface.
Camera navigation supports a maximum of φ 100 mm specimen.

(*)

Camera navigation function is optional

Detection System Enabling Dynamic Observation

The SU7000 supports observation under various environmental conditions. A variety of detectors ^(*) such as UVD and MD are selectable in addition to the PD-BSED for observation under low-vacuum conditions. 

Detector Selection Under Low-Vacuum Conditions
Specimen: Fiber with metallic oxide
Left: MD (Backscattered electron) image
Right: UVD (SE image)
The oxide dispersion and fiber layering state are observed respectively.

Left: Traditional PD-BSED response at the scan rate of 30 ms x 64 frames
Right: SU7000 PD-BSED image demonstrating improved response and image quality to expand in-situ observation capability